Gas scrubbers for vacuum coating
For the vacuum coating of special surfaces such as titanium metal, glass reflectors and hard metal cutting tools, titanium tetrachloride (TiCl4) is used and released as waste gas. The latter substance is also applied for the polymerisation of acetylene.
VSS-Umwelttechnik has developed an exhaust air plant which operates in 3 stages, chemically converting titanium tetrachloride into hydrogen chloride (HCl) whilst taking into account both the sluggish hydrolysis (as a result of reaction kinetics) and the formation of fine titanium dioxide dust in the submicron range. The system consists of a reaction chamber, a packed-bed column and a propelled jet fan, combined with an aerosol separator.
Our 3-stage TiCl4/HDMSO scrubber column achieves scrubbed gas values of < 10 mg/m3 HCl, < 3 mg/m3 Cl2 and dust values of < 20 mg/m3.