Epitaxy scrubbers

VSS-Umwelttechnik supplies process gas scrubbers which are designed for the separation of gases from epitaxy processes.

For the production of semiconductors, VSS-Umwelttechnik has developed the PURGAVI scrubber. The latter is suitable for epitaxy processes where trichlorosilane (TCS) and dichlorosilane (DCS) with hydrogen (H₂) are used as the carrier gas. In the case that concentrated lye is used, separation of silane is also possible.

All VSS-Umwelttechnik systems guarantee high reliability and long lifespans for the most widely differing types of processes. The legal requirements originating in the ATEX 94/9/EC directive and the prevention of electrostatic charging in accordance with BGR 132 have been taken into account.
The PURGAVI process gas scrubber corresponds to the new German Equipment and Product Safety Act (GPSG).

In order to prevent electrostatic charging of the pipe between the process exhaust pipe – usually made of 1.4571 – and the wet section of the gas scrubber, the gas inlet pipe is manufactured out of an electrically conductive plastic material.